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Characterization of Si Epitaxial Layer grown on highly-doped Si substrate by using THz reflection spectroscopy

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dc.contributor.authorLee, Nam-Young-
dc.contributor.authorOh, SeungJae-
dc.contributor.authorKim, ChungTae-
dc.contributor.authorHong, JiJoong-
dc.date.accessioned2023-04-07T01:13:20Z-
dc.date.available2023-04-07T01:13:20Z-
dc.date.created2023-03-28-
dc.date.issued2022-09-
dc.identifier.issn2162-2027-
dc.identifier.urihttps://ir.ymlib.yonsei.ac.kr/handle/22282913/193823-
dc.description.abstractProperties of Si epitaxial layer with thinner thickness than 6um and doping concentration of 10(14) to 10(16)/cm(3), grown on highly doped Si substrate, were analyzed by time domain THz reflection spectroscopy. For improving the measurement resolutions, photo-excitation technique was applied on this spectroscopy. And we could obtain the epilayer properties with resolutions of 0.1um in thickness and 10(15)/cm(3) in doping concentration.-
dc.description.statementOfResponsibilityrestriction-
dc.language영어-
dc.publisherIEEE-
dc.relation.isPartOf2022 47TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ 2022)-
dc.rightsCC BY-NC-ND 2.0 KR-
dc.titleCharacterization of Si Epitaxial Layer grown on highly-doped Si substrate by using THz reflection spectroscopy-
dc.typeArticle-
dc.contributor.collegeCollege of Medicine (의과대학)-
dc.contributor.departmentResearch Institute (부설연구소)-
dc.contributor.googleauthorLee, Nam-Young-
dc.contributor.googleauthorOh, SeungJae-
dc.contributor.googleauthorKim, ChungTae-
dc.contributor.googleauthorHong, JiJoong-
dc.identifier.doi10.1109/IRMMW-THz50927.2022.9896099-
dc.contributor.alternativeNameOh, Seung Jae-
dc.contributor.affiliatedAuthorOh, SeungJae-
dc.identifier.scopusid2-s2.0-85139846763-
dc.identifier.wosid000865953000579-
dc.citation.volume2022-August-
dc.identifier.bibliographicCitation2022 47TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ 2022), Vol.2022-August, 2022-09-
dc.identifier.rimsid78170-
dc.type.rimsART-
dc.description.journalClass1-
dc.description.journalClass1-
dc.type.docTypeProceedings Paper-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscopus-
dc.relation.journalWebOfScienceCategoryEngineering, Electrical & Electronic-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryOptics-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalResearchAreaEngineering-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaOptics-
dc.relation.journalResearchAreaPhysics-
Appears in Collections:
1. College of Medicine (의과대학) > Research Institute (부설연구소) > 1. Journal Papers
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