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Deposition of ZnO films grown by pulsed laser deposition for film bulk acoustic resonators

DC Field Value Language
dc.contributor.author김찬윤-
dc.date.accessioned2015-06-10T11:58:01Z-
dc.date.available2015-06-10T11:58:01Z-
dc.date.issued2006-
dc.identifier.issn0749-6036-
dc.identifier.urihttps://ir.ymlib.yonsei.ac.kr/handle/22282913/108945-
dc.description.abstractThe characteristics of ZnO films are reported depending on different deposition conditions for film bulk acoustic resonators (FBARs). The ZnO films have been deposited on Al films evaporated on p-type (100) silicon substrate by a pulsed laser deposition (PLD) technique using a Nd:YAG laser. We have investigated the c-axis orientation and the electrical resistivity of the ZnO films. These results show the possibility of FBAR devices using PLD.-
dc.description.statementOfResponsibilityopen-
dc.format.extent50~59-
dc.relation.isPartOfSUPERLATTICES AND MICROSTRUCTURES-
dc.rightsCC BY-NC-ND 2.0 KR-
dc.rights.urihttps://creativecommons.org/licenses/by-nc-nd/2.0/kr/-
dc.titleDeposition of ZnO films grown by pulsed laser deposition for film bulk acoustic resonators-
dc.typeArticle-
dc.contributor.collegeCollege of Medicine (의과대학)-
dc.contributor.departmentDept. of Ophthalmology (안과학)-
dc.contributor.googleauthorGun Hee Kim-
dc.contributor.googleauthorByung Du Ahn-
dc.contributor.googleauthorHong Seong Kang-
dc.contributor.googleauthorSung Hoon Lim-
dc.contributor.googleauthorSang Yeol Lee-
dc.identifier.doi10.1016/j.spmi.2005.08.074-
dc.admin.authorfalse-
dc.admin.mappingfalse-
dc.contributor.localIdA01035-
dc.relation.journalcodeJ02696-
dc.identifier.eissn1096-3677-
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0749603605001242-
dc.contributor.alternativeNameKim, Chan Yun-
dc.contributor.affiliatedAuthorKim, Chan Yun-
dc.rights.accessRightsnot free-
dc.citation.volume39-
dc.citation.number1-4-
dc.citation.startPage50-
dc.citation.endPage59-
dc.identifier.bibliographicCitationSUPERLATTICES AND MICROSTRUCTURES, Vol.39(1-4) : 50-59, 2006-
Appears in Collections:
1. College of Medicine (의과대학) > Dept. of Ophthalmology (안과학교실) > 1. Journal Papers
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