Gas Typed Digital X-ray Image Sensor Using PDP Fabrication Process
김창만 ; 김시형 ; 송광섭 ; 김상희 ; 남기창
전자공학회논문지, Vol.49(9) : 322~327, 2012
Parallel-plate-type scanning sensors have been commercially used for X-ray imaging sensors. In this study, we manufactured the scan typed 1D X-ray image sensor that can be used to obtain scanning images, by using the plasma display panel (PDP) fabrication process. We fabricated drift and pixel electrodes in the glass chamber and injected Xe gas at atmospheric pressure. We evaluated the intensity of a pixel signal depending on the bias voltage on the drift electrode and investigated the characteristics of shielding effect on the single pixel using lead (Pb). The adsorption rate of X-ray photon is low (4%) on the soda lime glass (1.1㎜) and the electrical signal detected on the X-ray sensor was increased in the high bias voltage. We acquired digital X-ray scanning image with our DAS (data acquisition system) and sensor scanning system.